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High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate Hyung, S.L.; Young, J.Y.; Choi, D.-H.; Yoon, Jun-Bo, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, pp.180 - 183, 123, 2008-01-13 |
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