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Memory window enhancement in n-type ferroelectric field-effect transistors by engineering ozone exposure in atomic layer deposition of HfZrOx films Jeon, Jihoon; Kuk, Song-Hyeon; Cho, Ah-Jin; Baek, Seung-Hyub; Kim, Sang-Hyeon; Kim, Seong Keun, APPLIED PHYSICS LETTERS, v.122, no.23, 2023-06 |
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