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Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition Park, Hamin; Kim, Tae-Keun; Cho, Sung Woo; Jang, Hong Seok; Lee, Sang Ick; Choi, Sung-Yool, SCIENTIFIC REPORTS, v.7, 2017-01 |
Plasma-Enhanced Atomic Layer Deposition of Uniform Hexagonal Boron Nitride Films Park, Hamin; Kim, Tae Keun; Cho, Sung Woo; Jang, Hong Seok; Lee, Sang Ick; Choi, Sung-Yool, MRS SPRING MEETING 2017, MRS SPRING MEETING 2017, 2017-04-20 |
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