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Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating Yoon, Seong Jun; Pak, Kwanyong; Taewook Nam; Yoon, Alexander; Kim, Hyungjun; Im, Sung Gap; Cho, Byung Jin, ACS NANO, v.11, no.8, pp.7841 - 7847, 2017-08 |
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