Browse "School of Electrical Engineering(전기및전자공학부)" by Author Baek, JT
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| Modeling and characterization of gas-phase etching of thermal oxide and TEOS oxide using anhydrous HF and CH3OH Lee, CS; Baek, JT; Yoo, Hyung Joun; Woo, Seong-Ihl, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.143, no.3, pp.1099 - 1103, 1996-03 |
| TiN barrier layer formation by the two-step rapid thermal conversion process Kim, YT; Jun, CH; Lee, JH; Baek, JT; Joun, H; Yoo, Hyung Joun, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.14, no.6, pp.3245 - 3251, 1996 |
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