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Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithography of a thick photoresist Yoon, Jun-Bo; Han, CH; Yoon, E; Kim, CK, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.12B, pp.7081 - 7085, 1998-12 |
Surface micromachined solenoid on-Si and on-glass inductors for RF applications Yoon, Jun-Bo; Kim, BK; Han, CH; Yoon, ES; Kim, CK, IEEE ELECTRON DEVICE LETTERS, v.20, no.9, pp.487 - 489, 1999-09 |
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