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Functionalized Graphene as an Ultrathin Seed Layer for the Atomic Layer Deposition of Conformal High-k Dielectrics on Graphene Shin, Woocheol; Bong, Jae Hoon; Choi, Sung-Yool; Cho, Byung Jin, ACS APPLIED MATERIALS INTERFACES, v.5, no.22, pp.11515 - 11519, 2013-11 |
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