Showing results 1 to 1 of 1
Verification of Directed Self-Assembly (DSA) Guide Patterns through Machine Learning Shim, Seongbo; Cai, Sibo; Yang, Seunghune; Choi, Jungdal; Shin, Youngsoo, Conference on Alternative Lithographic Technologies VII, SPIE, 2015-02-26 |
Discover