Reduced Interface Diffusion of Cu Interconnects by Graphene-Based Capping Layer

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Publisher
한국그래핀연구회
Issue Date
2015-03-26
Language
English
Citation

The 2nd Korean Graphene Symposium

URI
http://hdl.handle.net/10203/198673
Appears in Collection
EE-Conference Papers(학술회의논문)
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