DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jaewoo | ko |
dc.contributor.author | Je, Changhan | ko |
dc.contributor.author | Kim, Yi-Gyeong | ko |
dc.contributor.author | Lee, Sung Q. | ko |
dc.contributor.author | Yang, Woo-Seok | ko |
dc.contributor.author | Lee, Sang-Gug | ko |
dc.date.accessioned | 2015-05-22T02:11:49Z | - |
dc.date.available | 2015-05-22T02:11:49Z | - |
dc.date.created | 2015-01-27 | - |
dc.date.created | 2015-01-27 | - |
dc.date.created | 2015-01-27 | - |
dc.date.issued | 2014-12 | - |
dc.identifier.citation | MICRO & NANO LETTERS, v.9, no.12, pp.845 - 849 | - |
dc.identifier.issn | 1750-0443 | - |
dc.identifier.uri | http://hdl.handle.net/10203/198518 | - |
dc.description.abstract | A bottom-inlet-type micro-electro-mechanical system acoustic sensor based on two polyimide/a-Si sacrificial layers is presented. A diaphragm was adapted to be on the top side of the sacrificial layers, showing the bottom-inlet structure for the package, which has the sensitivity of more than 3 dB compared with that of the top-inlet type. Also, the fundamental CMOS process implemented with Al electrodes was applied to have simple releasing steps by O-2 ashing and XeF2 isotropic etching because of their material etching selectivity. The sensor module had a sensitivity of -38.9 dBV/Pa at 1 kHz with a bias of 9.2 V in the sweep range from 100 Hz to 16 kHz. In addition, to evaluate the open-circuit sensitivity, structure-based equivalent circuit modelling was performed with lumped parameters. The modelled sensitivity was in good agreement with the measured sensitivity in the error rate of 4.3% under 8 kHz, demonstrating the validity of the modelling. The modelled open-circuit sensitivity was determined to be -37.2 dBV/Pa at 1 kHz using the proposed lumped model. | - |
dc.language | English | - |
dc.publisher | INST ENGINEERING TECHNOLOGY-IET | - |
dc.title | Bottom-inlet-type micro-electro-mechanical system acoustic sensors based on two polyimide/amorphous-Si sacrificial layers | - |
dc.type | Article | - |
dc.identifier.wosid | 000346637200005 | - |
dc.identifier.scopusid | 2-s2.0-84928234974 | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 845 | - |
dc.citation.endingpage | 849 | - |
dc.citation.publicationname | MICRO & NANO LETTERS | - |
dc.identifier.doi | 10.1049/mnl.2014.0381 | - |
dc.contributor.localauthor | Lee, Sang-Gug | - |
dc.contributor.nonIdAuthor | Je, Changhan | - |
dc.contributor.nonIdAuthor | Kim, Yi-Gyeong | - |
dc.contributor.nonIdAuthor | Lee, Sung Q. | - |
dc.contributor.nonIdAuthor | Yang, Woo-Seok | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
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