Study on the metal nanoparticles sintering for maskless fabrication of electrode pattern using digital micromirror device금속나노입자 소결과 DMD를 응용한 전도성 박막의 마스크리스 제조공정에 관한 연구

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dc.contributor.advisorKim, Taek-Soo-
dc.contributor.advisor김택수-
dc.contributor.authorAn, Kun-Sik-
dc.contributor.author안건식-
dc.date.accessioned2015-04-23T07:14:24Z-
dc.date.available2015-04-23T07:14:24Z-
dc.date.issued2014-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=568798&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/197546-
dc.description학위논문(석사) - 한국과학기술원 : 기계공학전공, 2014.2, [ iv, 34 p. ]-
dc.description.abstractMetal thin film fabrication is studied with laser illumination with digital micromirror device (DMD). It is like "optical stamping" of silver (Ag) nanoparticle (NP) ink for the facile fabrication of 2D electrode pattern without any conventional lithographic means or scanning procedure. An arbitrary 2D pattern at the lateral size of 25 μm X 25 μm with 160 nm height is readily produced on a glass substrate by a short exposure of 532 nm Nd:YAG continuous wave laser. The resultant metal pattern exhibits low electrical resistivity of 10.8 uΩ o cm, and also shows a fine edge sharpness by the virtue of low thermal conductivity of Ag NP ink. Furthermore, 10 X 10 star-shaped micropattern array are fabricated through step-and-repeat scheme to ensure the potential of this process for the large-area metal pattern fabrication.eng
dc.languageeng-
dc.publisher한국과학기술원-
dc.subjectoptical stamping-
dc.subject저온 공정-
dc.subject비진공 환경-
dc.subject레이저 소결-
dc.subject나노 입자 잉크-
dc.subjectDMD-
dc.subjectdigital micromirror device-
dc.subjectnanoparticles ink-
dc.subjectnanoparticle laser sintering-
dc.subjectnon-vacuum environment-
dc.subjectlow temperature thin film patterning-
dc.subject광학적 도장 공정-
dc.titleStudy on the metal nanoparticles sintering for maskless fabrication of electrode pattern using digital micromirror device-
dc.title.alternative금속나노입자 소결과 DMD를 응용한 전도성 박막의 마스크리스 제조공정에 관한 연구-
dc.typeThesis(Master)-
dc.identifier.CNRN568798/325007 -
dc.description.department한국과학기술원 : 기계공학전공, -
dc.identifier.uid020123382-
dc.contributor.localauthorKim, Taek-Soo-
dc.contributor.localauthor김택수-
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