$AlCl_3$ 분위기를 이용한 LPCVD 비정질 실리콘 박막의 고상 결정화Solid phase crystallization of LPCVD a-Si films in $AlCl_3$ atmosphere
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 엄지혜 | - |
| dc.contributor.author | Eum, Ji-Hye | - |
| dc.date.accessioned | 2015-04-23T07:11:24Z | - |
| dc.date.available | 2015-04-23T07:11:24Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=586348&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/197396 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ v, 66 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | $AlCl_3$ 분위기를 이용한 LPCVD 비정질 실리콘 박막의 고상 결정화 | - |
| dc.title.alternative | Solid phase crystallization of LPCVD a-Si films in $AlCl_3$ atmosphere | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 586348/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000993315 | - |
| dc.contributor.localauthor | 안병태 | - |
| dc.contributor.localauthor | Ahn, Byung-Tae | - |
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