$AlCl_3$ 분위기를 이용한 LPCVD 비정질 실리콘 박막의 고상 결정화Solid phase crystallization of LPCVD a-Si films in $AlCl_3$ atmosphere
- Advisors
- 안병태researcher; Ahn, Byung-Tae
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2000
- Identifier
- 586348/325007 / 000993315
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ v, 66 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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