DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Choi, Yang-Kyu | - |
dc.contributor.advisor | 최양규 | - |
dc.contributor.author | Hong, Hee-Jeong | - |
dc.contributor.author | 홍희정 | - |
dc.date.accessioned | 2015-04-23T06:14:55Z | - |
dc.date.available | 2015-04-23T06:14:55Z | - |
dc.date.issued | 2014 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=592430&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/196822 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2014.8, [ ii, 37 ] | - |
dc.description.abstract | Ammonium sulfide ($(NH_4)_2S$) is used for the pretreatment of an InP (100) substrate and its conditions are optimized. The capacitance-voltage (C-V) characteristics of InP MOS capacitors are analyzed by changing the concentration and treatment time of the ammonium sulfide solution. It was found that a 10% $(NH_4)_2S$ treatment for 10 min exhibits the best electrical properties in terms of hysteresis and frequency dispersions in the a depletion or accumulation mode. After the InP substrate was passivated by the optimized ammonium sulfide, the results of x-ray photoelectron spectroscopy (XPS) and the extracted interface trap density ($D_{it}$) prove that the growth of native oxide is suppressed | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | III-V semiconductor | - |
dc.subject | 황 패시베이션 | - |
dc.subject | 황화암모늄 | - |
dc.subject | 알루미늄 산화물 | - |
dc.subject | 인듐 포스파이드 | - |
dc.subject | 화합물 반도체 | - |
dc.subject | indium phosphide (InP) | - |
dc.subject | Al2O3 | - |
dc.subject | (NH4)2S | - |
dc.subject | sulfur passivation | - |
dc.title | Process engineering of the surface passivation using $(NH_4)_2S$ for the InP MOS capacitor with ALD $Al_2O_3$ | - |
dc.title.alternative | $Al_2O_3$를 사용한 InP MOS capacitor에서의 $(NH_4)_2S$를 이용한 기판 표면 패시베이션의 실험적 최적화에 대한 연구 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 592430/325007 | - |
dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
dc.identifier.uid | 020124580 | - |
dc.contributor.localauthor | Choi, Yang-Kyu | - |
dc.contributor.localauthor | 최양규 | - |
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