Design and Optimization of Long Stroke Planar Motion Maglev Stage using Copper Strip Array

Abstract

The main purpose of this proposed maglev stage is to transport a 450 mm wafer in a vacuum environment. To realize a long stroke and a large size mover, a stator was designed using a copper strip array. The mover contains a halbach magnet array and the fixture part has characteristics of low weight and high structural bandwidth for fast response. Since the relationship between the design variables and the system performance is complicated, an optimization procedure was used to obtain optimal design variables. Based on the optimization solution, detailed design was performed and the system's stability was checked by several simulations. Finally, the proposed maglev system was manufactured.