Design of a Six-Degree-of-Freedom Motion Fine Stage Driven by Voice Coil Motors with Flexural Guides

Abstract

Fine stage has been used in various fields of industries. Numerous types of fine stages have been researched and developed. In this paper, a fine stage using voice coil motors as actuators with flexural guides was proposed. The fine stage was mainly designed to eliminate coupled motion by location of VCM and using rotational hinges on flexural guides. System specification was determined by required performance. With the system specification, VCM was optimally designed to satisfy the specification. A flexural guide was conceptually designed to perform six-degree-of-freedom motions.