Feedback control of cluster tools for wafer delay regulation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Chulhan | ko |
| dc.contributor.author | Lee, Tae-Eog | ko |
| dc.date.accessioned | 2015-01-29T05:35:59Z | - |
| dc.date.available | 2015-01-29T05:35:59Z | - |
| dc.date.created | 2014-12-24 | - |
| dc.date.issued | 2014-07-15 | - |
| dc.identifier.citation | 20th Conference of the International Federation of Operational Research Societies | - |
| dc.identifier.uri | http://hdl.handle.net/10203/193468 | - |
| dc.language | English | - |
| dc.publisher | IFORS | - |
| dc.title | Feedback control of cluster tools for wafer delay regulation | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 20th Conference of the International Federation of Operational Research Societies | - |
| dc.identifier.conferencecountry | SP | - |
| dc.identifier.conferencelocation | Centre de Convencions Internacional de Barcelona | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
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