High-Yield Etching-Free Transfer of Graphene: A Fracture Mechanics Approach

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Transfer is the critical issue of producing high-quality and scalable graphene electronic devices. However,conventional transfer processes require the removal of an underlying metal layer by wet etching process, which inducessignificant economic and environmental problems. We propose the etching-free mechanical releasing of graphene usingpolymer adhesives. A fracture mechanics approach was introduced to understand the releasing mechanism and ensure highyieldprocess. It is shown that the thickness of adhesive and target substrate affect the transferability of graphene. Basedon experimental and fracture mechanics simulation results, we further observed that compliant adhesives can reduce theadhesive stress during the transfer, which also enhances the success probability of graphene transfer.
Publisher
한국마이크로전자및패키징학회
Issue Date
2014-06
Language
Korean
Citation

마이크로전자 및 패키징학회지, v.20, no.2, pp.59 - 64

ISSN
1226-9360
DOI
10.6117/kmeps.2014.21.2.059
URI
http://hdl.handle.net/10203/192617
Appears in Collection
ME-Journal Papers(저널논문)
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