DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Jeong Hun | ko |
dc.contributor.author | Choi, Yong Whan | ko |
dc.contributor.author | Kim, Min Sung | ko |
dc.contributor.author | Um, Hyung Sik | ko |
dc.contributor.author | Lee, Sung Hoon | ko |
dc.contributor.author | Kim, Pilnam | ko |
dc.contributor.author | Suh, Kahp-Yang | ko |
dc.date.accessioned | 2014-12-09T01:24:37Z | - |
dc.date.available | 2014-12-09T01:24:37Z | - |
dc.date.created | 2014-07-30 | - |
dc.date.created | 2014-07-30 | - |
dc.date.issued | 2014-07 | - |
dc.identifier.citation | ACS APPLIED MATERIALS INTERFACES, v.6, no.14, pp.11734 - 11740 | - |
dc.identifier.issn | 1944-8244 | - |
dc.identifier.uri | http://hdl.handle.net/10203/192381 | - |
dc.description.abstract | Here, we report a method of fabricating thin layer of polydimethylsiloxane (PDMS), with a thickness in the range of 60-80 nm, which can be repeatedly generated (more than 10 times) from the same block of PDMS via controlled interfacial fracture. The thin layers can be transferred to various substrates by peeling off from the bulk PDMS. The cleavage is attributed to the built-in stress at the fracture interface due to plasma treatment, resulting in the repetitive formation of the thin membranes, with no residue from processing, and with a surface roughness of 5 nm. We were able to demonstrate transferred patterns with controlled thickness by varying the oxygen plasma treatment conditions and the composition of bulk PDMS stamp. Using the method, we achieved residual-free patterns with submicrometer resolution for applications in biomolecule array templates. | - |
dc.language | English | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.subject | DECAL TRANSFER LITHOGRAPHY | - |
dc.subject | ELASTIC-MODULUS | - |
dc.subject | SOFT MATERIALS | - |
dc.subject | CROSS-LINKING | - |
dc.subject | THIN-FILMS | - |
dc.subject | PLASMA | - |
dc.subject | PDMS | - |
dc.subject | ADHESION | - |
dc.subject | POLY(DIMETHYLSILOXANE) | - |
dc.subject | NANOFABRICATION | - |
dc.title | Repetitive Cleavage of Elastomeric Membrane via Controlled Interfacial Fracture | - |
dc.type | Article | - |
dc.identifier.wosid | 000339472100111 | - |
dc.identifier.scopusid | 2-s2.0-84904961504 | - |
dc.type.rims | ART | - |
dc.citation.volume | 6 | - |
dc.citation.issue | 14 | - |
dc.citation.beginningpage | 11734 | - |
dc.citation.endingpage | 11740 | - |
dc.citation.publicationname | ACS APPLIED MATERIALS INTERFACES | - |
dc.identifier.doi | 10.1021/am502477w | - |
dc.contributor.localauthor | Kim, Pilnam | - |
dc.contributor.nonIdAuthor | Kim, Jeong Hun | - |
dc.contributor.nonIdAuthor | Choi, Yong Whan | - |
dc.contributor.nonIdAuthor | Kim, Min Sung | - |
dc.contributor.nonIdAuthor | Um, Hyung Sik | - |
dc.contributor.nonIdAuthor | Lee, Sung Hoon | - |
dc.contributor.nonIdAuthor | Suh, Kahp-Yang | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | interfacial fracture | - |
dc.subject.keywordAuthor | elastic mismatch | - |
dc.subject.keywordAuthor | decal transfer | - |
dc.subject.keywordAuthor | polymer patterning | - |
dc.subject.keywordAuthor | nano membrane | - |
dc.subject.keywordPlus | DECAL TRANSFER LITHOGRAPHY | - |
dc.subject.keywordPlus | ELASTIC-MODULUS | - |
dc.subject.keywordPlus | SOFT MATERIALS | - |
dc.subject.keywordPlus | CROSS-LINKING | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | PLASMA | - |
dc.subject.keywordPlus | PDMS | - |
dc.subject.keywordPlus | ADHESION | - |
dc.subject.keywordPlus | POLY(DIMETHYLSILOXANE) | - |
dc.subject.keywordPlus | NANOFABRICATION | - |
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