Fabrication of high performance replica molds for UV curing nanoimprint lithography using diazoketo functionalized POSS hybrid resists
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, Seung Min | - |
| dc.contributor.author | 우승아 | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2014-12-08T08:50:58Z | - |
| dc.date.available | 2014-12-08T08:50:58Z | - |
| dc.date.created | 2014-10-27 | - |
| dc.date.issued | 2014-04-10 | - |
| dc.identifier.citation | 차세대 리소그래피학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/191921 | - |
| dc.language | English | - |
| dc.publisher | 한국광학회 | - |
| dc.title | Fabrication of high performance replica molds for UV curing nanoimprint lithography using diazoketo functionalized POSS hybrid resists | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 차세대 리소그래피학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | Shin, Seung Min | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | 우승아 | - |
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