DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Taek-Soo | - |
dc.contributor.author | Zhong, Q | - |
dc.contributor.author | Peterson, M | - |
dc.contributor.author | Tam, H | - |
dc.contributor.author | Konno, T | - |
dc.contributor.author | Dauskardt, R.H. | - |
dc.date.accessioned | 2014-11-12 | - |
dc.date.available | 2014-11-12 | - |
dc.date.created | 2014-01-14 | - |
dc.date.issued | 2008-03-24 | - |
dc.identifier.citation | Materials Research Society 2008 Spring Meeting, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/191037 | - |
dc.language | ENG | - |
dc.publisher | Materials Research Society | - |
dc.title | Stress and Solution Chemistry Effects for Optimized CMP of Ultra-Low-k Dielectrics | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Materials Research Society 2008 Spring Meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Kim, Taek-Soo | - |
dc.contributor.nonIdAuthor | Zhong, Q | - |
dc.contributor.nonIdAuthor | Peterson, M | - |
dc.contributor.nonIdAuthor | Tam, H | - |
dc.contributor.nonIdAuthor | Konno, T | - |
dc.contributor.nonIdAuthor | Dauskardt, R.H. | - |
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