DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Taek-Soo | - |
dc.contributor.author | Konno, T | - |
dc.contributor.author | Yamanaka, T | - |
dc.contributor.author | R.H. Dauskardt | - |
dc.date.accessioned | 2014-11-12 | - |
dc.date.available | 2014-11-12 | - |
dc.date.created | 2014-01-14 | - |
dc.date.issued | 2009-04-14 | - |
dc.identifier.citation | Materials Research Society 2009 Spring Meeting, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/191032 | - |
dc.language | ENG | - |
dc.publisher | Materials Research Society | - |
dc.title | Quantitative Roadmap for Optimizing CMP of Ultralow-k Dielectrics | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Materials Research Society 2009 Spring Meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Kim, Taek-Soo | - |
dc.contributor.nonIdAuthor | Konno, T | - |
dc.contributor.nonIdAuthor | Yamanaka, T | - |
dc.contributor.nonIdAuthor | R.H. Dauskardt | - |
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