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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Tuning UV Curing Depth Profiles for Optimal Mechanical Properties of Low-k Films

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dc.contributor.authorKim, Taek-Soo-
dc.contributor.authorChumakov, D-
dc.contributor.authorZschech, E-
dc.contributor.authorR.H. Dauskardt-
dc.date.accessioned2014-11-12-
dc.date.available2014-11-12-
dc.date.created2014-01-14-
dc.date.issued2009-04-14-
dc.identifier.citationMaterials Research Society 2009 Spring Meeting, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/191031-
dc.languageENG-
dc.publisherMaterials Research Society-
dc.titleTuning UV Curing Depth Profiles for Optimal Mechanical Properties of Low-k Films-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameMaterials Research Society 2009 Spring Meeting-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Taek-Soo-
dc.contributor.nonIdAuthorChumakov, D-
dc.contributor.nonIdAuthorZschech, E-
dc.contributor.nonIdAuthorR.H. Dauskardt-
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ME-Conference Papers(학술회의논문)
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