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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Molecular Diffusion under Nanometer Scale Confinement during CMP of Nanoporous Films

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dc.contributor.authorKim, Taek-Soo-
dc.contributor.authorR.H. Dauskardt-
dc.date.accessioned2014-11-12-
dc.date.available2014-11-12-
dc.date.created2014-01-14-
dc.date.issued2010-04-28-
dc.identifier.citation2010 NCCAVS CMPUG, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/191010-
dc.languageENG-
dc.publisherNCCAVS CMPUG-
dc.titleMolecular Diffusion under Nanometer Scale Confinement during CMP of Nanoporous Films-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname2010 NCCAVS CMPUG-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Taek-Soo-
dc.contributor.nonIdAuthorR.H. Dauskardt-
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ME-Conference Papers(학술회의논문)
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