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ALD based metal-insulator-metal (MIM) nanocapacitors for energy storage

Banerjee P.; Perez I.; Henn-Lecordier L.; Lee, Sang Bok; Rubloff G.W., 5th Symposium on Atomic Layer Deposition - 216th Meeting of the Electrochemical Society, v.25, pp.345 - 353, 2009-10-05

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