Browse "Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)" by Subject Silane plasma
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| Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas Chai, Kil-Byoung; Seon, Chang-Rae; Moon, Se-Youn; Choe, Won-Ho, THIN SOLID FILMS, v.518, pp.6614 - 6618, 2010-09 |
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