Investigation and Improvement of 90 degrees Direct Bends of Metal-Insulator-Silicon-Insulator-Metal Waveguides

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We investigate 90 degrees direct bends of metal-insulator-silicon-insulator-metal (MISIM) waveguides, which are hybrid plasmonic waveguides with replaceable insulators. First, we fabricate them using fully standard CMOS technology and characterize them. The experimental excess loss of the two consecutive 90 degrees direct bends is 11, 7.4, and 4.5 dB when the width of the Si line of the MISIM waveguide is about 160, 190, and 220 nm, respectively. Second, we analyze the experimental results using the 3-D finite-difference time-domain method. Through the analysis, we investigate possible loss mechanisms of the 90 degrees direct bend, which have not been studied to our knowledge. It has been found that the Si lines should be narrow to reduce the excess losses of the 90 degrees direct bends. However, the wide Si lines are better for ease of fabrication and for small propagation losses. Finally, we demonstrate a modified low-loss 90 degrees direct bend of the MISIM waveguide with a wide Si line.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2013-10
Language
English
Article Type
Article
Keywords

PLASMONICS; COMPONENTS; CONFINEMENT; DEVICES; SCALE

Citation

IEEE PHOTONICS JOURNAL, v.5, no.5

ISSN
1943-0655
DOI
10.1109/JPHOT.2013.2281983
URI
http://hdl.handle.net/10203/189362
Appears in Collection
EE-Journal Papers(저널논문)
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