The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma

Abstract

In capacitively coupled plasma, the driving frequency is changed to modify the ion bombardment energy and electron density. The multi-hole electrode capacitively coupled plasma is discharged with various driving frequencies of 13.56 MHz, 27.12 MHz, and 40.68 MHz, in order to elucidate the frequency effects of the discharge. The change of the driving frequency modifies the plasma parameters and the length of the sheath. As a result, the optimum diameter of the holes on the multi-hole electrode for efficient capacitively coupled plasma discharge changes. Crown Copyright (C) 2012 Published by Elsevier B.V. All rights reserved.