밀도기반 클러스터링을 이용한 반도체 공정의 결함 패턴 분석 알고리즘 개발Development of an algorithm for defect pattern analysis in semiconductor manufacturing using density-based clustering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 염봉진 | - |
| dc.contributor.advisor | Yum, Bong-Jin | - |
| dc.contributor.author | 구재훈 | - |
| dc.contributor.author | Koo, Jae-Hoon | - |
| dc.date.accessioned | 2013-09-12T05:57:49Z | - |
| dc.date.available | 2013-09-12T05:57:49Z | - |
| dc.date.issued | 2012 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=487371&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/182500 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 산업및시스템공학과, 2012.2, [ iv, 48 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 밀도기반 클러스터링 | - |
| dc.subject | 의사결정나무 | - |
| dc.subject | Core Point | - |
| dc.subject | Join-Count Statistics | - |
| dc.subject | Decision Tree | - |
| dc.subject | Density-Based Clustering | - |
| dc.title | 밀도기반 클러스터링을 이용한 반도체 공정의 결함 패턴 분석 알고리즘 개발 | - |
| dc.title.alternative | Development of an algorithm for defect pattern analysis in semiconductor manufacturing using density-based clustering | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 487371/325007 | - |
| dc.description.department | 한국과학기술원 : 산업및시스템공학과, | - |
| dc.identifier.uid | 020103042 | - |
| dc.contributor.localauthor | 염봉진 | - |
| dc.contributor.localauthor | Yum, Bong-Jin | - |
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