마스크가 필요없는 노광 기술을 위한 대용량 폴리곤의 래스터화Rasterization of massive polygons for maskless lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 신하용 | - |
| dc.contributor.advisor | Shin, Ha-Yong | - |
| dc.contributor.author | 신용철 | - |
| dc.contributor.author | Shin, Yong-Cheol | - |
| dc.date.accessioned | 2013-09-12T05:57:32Z | - |
| dc.date.available | 2013-09-12T05:57:32Z | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=487955&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/182487 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 산업및시스템공학과, 2008.2, [ iv, 53 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 마스크리스 | - |
| dc.subject | 리소그라피 | - |
| dc.subject | 래스터라이제이션 | - |
| dc.subject | maskless lithography | - |
| dc.subject | rasterization | - |
| dc.subject | polygon | - |
| dc.subject | 폴리곤 | - |
| dc.title | 마스크가 필요없는 노광 기술을 위한 대용량 폴리곤의 래스터화 | - |
| dc.title.alternative | Rasterization of massive polygons for maskless lithography | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 487955/325007 | - |
| dc.description.department | 한국과학기술원 : 산업및시스템공학과, | - |
| dc.identifier.uid | 020073276 | - |
| dc.contributor.localauthor | 신하용 | - |
| dc.contributor.localauthor | Shin, Ha-Yong | - |
- Appears in Collection
- IE-Theses_Master(석사논문)
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