UV-나노임프린트 리소그래피에서의 점착 및 잔류층 두께 측정에 관한 연구A study on adhesion characteristics and measurement of residual layer thickness in UV-nanoimprint lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김경웅 | - |
| dc.contributor.advisor | Kim, Kyung-Woong | - |
| dc.contributor.author | 허정철 | - |
| dc.contributor.author | Heo, Jung-Chul | - |
| dc.date.accessioned | 2013-09-12T02:34:57Z | - |
| dc.date.available | 2013-09-12T02:34:57Z | - |
| dc.date.issued | 2012 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=511293&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/181654 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 기계공학전공, 2012.8, [ viii, 120 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | DCB 실험 | - |
| dc.subject | 공정 조건 | - |
| dc.subject | 점착력 측정 | - |
| dc.subject | UV 나노임프린트 리소그래피 | - |
| dc.subject | 잔류층 두께 | - |
| dc.subject | UV-nanoimprint lithography | - |
| dc.subject | pull-off test | - |
| dc.subject | process condition | - |
| dc.subject | DCB test | - |
| dc.subject | residual layer thickness | - |
| dc.subject | capacitance measurement | - |
| dc.subject | 정전 용량 측정 | - |
| dc.title | UV-나노임프린트 리소그래피에서의 점착 및 잔류층 두께 측정에 관한 연구 | - |
| dc.title.alternative | A study on adhesion characteristics and measurement of residual layer thickness in UV-nanoimprint lithography | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 511293/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 020075201 | - |
| dc.contributor.localauthor | 김경웅 | - |
| dc.contributor.localauthor | Kim, Kyung-Woong | - |
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- ME-Theses_Ph.D.(박사논문)
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