학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2013.2, [ vi, 66 p. ]
원자층증착; 일함수; 고유전율; 금속게이트; Metal gate; TiAlN; HfO2; Effective work function; EWF; ALD; TDMAT; TMA; TiN
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