다파장 간섭계의 원리를 이용한 3차원 표면 형상 측정3D surface measurement using multi-wavelength interferometry
- Advisors
- 김승우researcher; Kim, Seung-Woo
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2012
- Identifier
- 487314/325007 / 020104442
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2012.2, [ iv, 62 p. ]
- Keywords
간섭계; 형상 측정; 위상천이; 광 빗; surface metrology; interferometer; phase-shifting; optical comb; optical frequency generation; 광주파수 생성
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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