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Multi-scale Monte Carlo Simulation of a Circular DC Magnetron Sputtering : Influence of Magnetron Design on Target Erosion and Film Deposition Kwon, Ui Hui; Lee, Won Jong, Japanese Journal of Applied Physics, Vol.45, No.11, pp.8629-8638, 2006-11-08 |
Multiscale Monte Carlo simulation of circular DC magnetron sputtering: Influence of magnetron design on target erosion and film deposition Kwon, Ui Hui; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS, v.45, no.11, pp.8629 - 8638, 2006-11 |
Study on target erosion in rocking magnet sputtering system 이도선; 권위휘; 이원종, 한국진공학회지, v.14, no.4, pp.245 - 251, 2005-12 |
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