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Fully Bottom-Up Waste-Free Growth of Ultrathin Silicon Wafer via Self-Releasing Seed Layer Hong, Ji-Eun; Lee, Yonghwan; Mo, Sung-In; Jeong, Hye-Seong; An, Jeong-Ho; Song, Hee-eun; Oh, Jihun; et al, ADVANCED MATERIALS, v.33, no.41, pp.2103708, 2021-10 |
Hot-Wire CVD 방법을 이용한 (100) Si과 다결정 Si 씨앗층에서의 저온 에피택셜 Si 성장에 관한 연구 = low-temperature growth of epitaxial Si on (100) Si and poly-Si seed layer using hot-wire CVDlink 이승렬; Lee, Seung-Ryul; et al, 한국과학기술원, 2008 |
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