Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject Ta-Si-N

Showing results 1 to 3 of 3

Structural and chemical stability of Ta-Si-N thin film between Si and Cu

Lee, YJ; Suh, BS; Rha, SK; Park, Chong-Ookresearcher, THIN SOLID FILMS, v.320, no.1, pp.141 - 146, 1998-05

Ta-base 비정질 박막의 Cu 확산 방지 특성에 관한 연구 = A study on the barrier property of Ta-base amorphous thin film against Cu diffusionlink

이윤직; Lee, Yoon-Jik; et al, 한국과학기술원, 1998

Transformer coupled plasma enhanced metal organic chemical vapor deposition of Ta(Si)N thin films and their Cu diffusion barrier properties

Park, HL; Byun, KM; Lee, Won-Jongresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, no.10, pp.6153 - 6164, 2002-10



. next

Open Access

Date issued


. next

rss_1.0 rss_2.0 atom_1.0