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Showing results 1 to 3 of 3

1
Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films

Abou-Ras, D.; Caballero, R.; Fischer, C. -H.; Kaufmann, C. A.; Lauermann, I.; Mainz, R.; Moenig, H.; et al, MICROSCOPY AND MICROANALYSIS, v.17, no.5, pp.728 - 751, 2011-10

2
Determination of optical and microstructural parameters of ceria films

Oh, Tae-Sik; Tokpanov, Yury S.; Hao, Yong; Jung, WooChul; Haile, Sossina M., JOURNAL OF APPLIED PHYSICS, v.112, no.10, 2012-11

3
Optical properties of thin amorphous silicon film on a phase shift mask for 157 nm lithography

Kim, SungKwan; Kim, YangSoo; Choi, YoungMin; Choi, JongWan; Hong, Jongin; Shon, JungMin; Sung, Tae-Hyun; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.43, no.5A, pp.2523 - 2529, 2004-05

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