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CHARACTERIZATION OF TRIMETHYLALUMINUM-N2O-HE GLOW-DISCHARGE IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF ALUMINUM-OXIDE FILMS KIM, YC; CHUN, JS; Lee, Won-Jong, THIN SOLID FILMS, v.258, no.1-2, pp.67 - 74, 1995-03 |
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