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FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구 조경원; 홍태환; 권순용; 최시경, 한국재료학회지, v.14, no.10, pp.688 - 695, 2004-10 |
Ferroelectric properties of lead-free (Bi,La)(4)Ti3O12 thin film deposited on MTP cell structure for high density FeRAM device Cho, KW; Kim, NK; Oh, SH; Choi, ES; Sun, HJ; Yeom, SJ; Lee, KN; et al, ECO-MATERIALS PROCESSING DESIGN VI BOOK SERIES: MATERIALS SCIENCE FORUM, v.486-487, pp.285 - 288, 2005 |
Platinum (100) hillock growth in Pt/Ti electrode stack for SrBi2Ta2O9 ferroelectric random access memory Jung, WW; Choi, Si-Kyung; Kweon, SY; Yeom, SJ, JOURNAL OF ELECTROCERAMICS, v.13, no.1-3, pp.55 - 63, 2004-07 |
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