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DC magnetron sputtering법을 이용한 Ir 하부전극의 형성 및 특성평가와 $(Ba,Sr)TiO_3$ 박막의 특성 평가 = Preparation and characterization of iridium bottom electrode by DC magnetron sputtering and characterization of $(Ba,Sr)TiO_3$ thin filmlink 박정호; Park, Jeong-Ho; et al, 한국과학기술원, 1998 |
Structural and electrical properties of transparent conducting Al2O3-doped ZnO thin films using off-axis DC magnetron sputtering Lee, Sunghwan; Kim, Seung-Hyun; Kim, Youngha; Kingon, Angus I.; Paine, David C.; No, Kwangsoo, MATERIALS LETTERS, v.85, pp.88 - 90, 2012-10 |
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