Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject copper(I) hexafluoroacetylacetonate trimethylvinylsilane [Cu(hfac)(tmvs)] kinetic study
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| Effect of the pressure on the chemical vapor deposition of copper from copper hexafluoroacetylacetonate trimethylvinylsilane Lee, WJ; Rha, SY; Lee, SY; Kim, DW; Park, Chong-Ook, THIN SOLID FILMS, v.305, pp.254 - 258, 1997-01 |
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