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Showing results 1 to 6 of 6

1
(A) study on high dielectric constant and low tolerance embedded capacitor materials and process = 고유전율 저 공차특성 내장형 커패시터 재료 및 공정에 대한 연구link

Hyun, Jin-Gul; 현진걸; et al, 한국과학기술원, 2010

2
(A) study on the plasma-enhanced atomic layer deposition of $SrTiO_3$ thin films = PEALD 법으로 증착된 $SrTiO_3$ 박막 증착 및 특성에 관한 연구link

Kim, Ja-Yong; 김자용; et al, 한국과학기술원, 2003

3
An Ionic Capacitor for Integrated Iontronic Circuits

Janson, Per; Gabrielsson, Erik O.; Lee, Keon Jae; Berggren, Magnus; Simon, Daniel T., ADVANCED MATERIALS TECHNOLOGIES, v.4, no.4, 2019-04

4
Ir 하부전극 위에서 PEALD로 증착 된 TiAlO 박막의 특성에 대한 연구 = A study on TiAlO films deposited by plasma enhanced atomic layer depositionlink

주대권; Joo, Dae-Kwon; et al, 한국과학기술원, 2009

5
(Pb,La)(Zr,Ti)O-3 thin films prepared by electron cyclotron resonance plasma enhanced chemical vapor deposition for the charge storage capacitor of a gigabit-scale dynamic random access memory

Shin, JS; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.1, pp.198 - 203, 1998-01

6
The effects of substrate temperature and lead precursor flow rate on the fabrication of (Pb,La)(Zr,Ti)O-3 thin films by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Shin, JS; Chun , Soung Soon; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.4A, pp.2200 - 2206, 1997-04

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