Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Subject OZONE
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| Atomic layer deposition of silicon oxide thin films by alternating exposures to Si(2)Cl(6) and O(3) Lee, Seung-Won; Park, Kwangchol; Han, Byeol; Son, Sang-Ho; Rha, Sa-Kyun; Park, Chong-Ook; Lee, Won-Jun, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.11, no.7, pp.23 - 26, 2008 |
| Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition Hur, M; Kim, DJ; Kang, WS; Lee, JO; Song, YH; Kim, Sang-Joon; Kim, Il-Doo, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.36, no.2, pp.679 - 691, 2016-03 |
| Size and top electrode-edge effects on fatigue in Pb(Zr,Ti)O-3 capacitors with Pt-electrodes Torii, K; Colla, EL; Song, HW; Tagantsev, AK; No, Kwangsoo; Setter, N, INTEGRATED FERROELECTRICS, v.32, no.1-4, pp.907 - 916, 2001 |
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