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Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks Jeon, Seokwoo; Park, JU; Cirelli, R; Yang, S; Heitzman, CE; Braun, PV; Kenis, PJA; et al, PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, v.101, no.34, pp.12428 - 12433, 2004-08 |
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