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Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3 Park, Kwangchol; Yun, Won-Deok; Choi, Byoung-Jun; Kim, Heon-Do; Lee, Won-Jun; Rha, Sa-Kyun; Park, Chong-Ook, THIN SOLID FILMS, v.517, no.14, pp.3975 - 3978, 2009-05 |
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