Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author Koh, Young-Bum
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| Applicability of fluorinated silicon nitride film as bottom antireflective layer in deep ultraviolet lithography Jun, Byung-Hyuk; Han, Sang-Soo; Kim, Dong-Wan; Kang, Ho-Young; Koh, Young-Bum; Bae, Byeong-Soo; No, Kwangsoo, Proceedings of the 1996 MRS Fall Meeting, v.446, pp.115 - 120, MRS, 1996-12-02 |
| Stability of CrFx films for phase-shifting mask Kim, Eun Ah; Hong, Seung Bum; Jiang, Zhong-Tao; Lim, Sung C; Woo, Sang-Gyun; Koh, Young-Bum; No, Kwangsoo, Photomask and X-Ray Mask Technology IV, v.3096, pp.294 - 297, 1997-04-17 |
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