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CMP 공정용 다이아몬드 코팅 컨디셔너의 마모와 연마 특성 = Investigation on wear and grinding characteristics of the diamond coated conditioner in CMP processlink 김연철; Kim, Youn-Chul; et al, 한국과학기술원, 2010 |
Novel CVD diamond-coated conditioner for improved performance in CMP processes Kim, Youn-Chul; Kang, Suk-Joong L, INTERNATIONAL JOURNAL OF MACHINE TOOLS MANUFACTURE, v.51, no.6, pp.565 - 568, 2011-06 |
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