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Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels Koo, Kunmo; Chang, Joon Ha; Ji, Sanghyeon; Choi, Hyuk; Cho, Seunghee H.; Yoo, Seung Jo; Choe, Jacob; et al, NANO LETTERS, v.24, no.16, pp.4900 - 4907, 2024-04 |
Etching Dynamics of Geometrically Confined Silicon Nanostructure Koo, Kunmo; Yuk, Jong Min; Chang, Joon Ha; Ji, Sanghyeon; Choi, Jacob; Shin, Sengmin; Lee, Geun-Taek; et al, 2022 Microscopy and Microanalysis, Microscopy Society of America, 2022-08-02 |
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