Browse "Dept. of Materials Science and Engineering(신소재공학과)" by Author Jiang, ZT
Showing results 1 to 19 of 19
| 0.25 ㎛ 리소그라피 공정에서 무반사층의 응용 노광수; 배병수; 전병혁; 한상수; Jiang, ZT; 김용범; 김동완; et al, 광학 및 양자전자 학술 발표회, 1996-01-01 |
| An Overview and Future Development of Single-Layer Halftone Phase-shifting Mask (SLHTPSM) Materials for DUV Microlithography 배병수; Jiang, ZT; 홍승범; Kim, EH; Lim, SC; Woo, SG; 고영범; et al, 한국요업학회 추계학술발표대회 , 한국요업학회, 1996 |
| Cr-Based Attenuated Phase Shifting Mask Materials for 193 nm Lithography No, Kwangsoo; Kim, E; Hong, SB; Jiang, ZT; Lim, S; Woo, SG; Koh, YB, Second Inter. sympo. on 193 nm Lithography86, 1996-01-01 |
| Dependence of the properties of (SrxTi1-x)O-3 thin films deposited by plasma-enhanced metal-organic chemical vapor deposition on electron cyclotron resonance plasma Lee, JS; Song, HW; Jun, BH; Kwack, DH; Yu, BG; Jiang, ZT; No, Kwangsoo, THIN SOLID FILMS, v.301, no.1-2, pp.154 - 161, 1997-06 |
| Deposition and characterization of epitaxial oxide layers on Si substrates Lee, Won-Jong; No, Kwangsoo; Song, HW; Lee, JS; Lee, HC; Hwang, DS; Jiang, ZT; et al, Proceedings of the 13th Korea-Japan seminar on new ceramics, 409, pp.409 - 413, 1997-01-01 |
| Effects of gas ring position and mesh introduction on film quality and thickness uniformity Hong, Daniel Seungbum; Kim, E; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; Lim, SC; Woo, S; et al, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.45, no.1-3, pp.98 - 101, 1997-03 |
| Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films Kim, CJ; Yoon, DS; Jiang, ZT; No, Kwangsoo, JOURNAL OF MATERIALS SCIENCE, v.32, no.5, pp.1213 - 1219, 1997-03 |
| Investigation on Applicability of Chromium-based Materials to Attenuated Phase Shift Mask for DUV Exposure Bae, Byeong-Soo; No, Kwangsoo; Hong, S; Kim, E; Jiang, ZT; Woo, SG; Koh,YB, pp.134 - 137, 1996-01-01 |
| Mass spectroscopic study for vaporization characteristics of Ba(TMHD)(2) and Sr(TMHD)(2) in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition Lee, JS; Song, HW; Kim, KS; Yu, BG; Jeong, YH; Jiang, ZT; No, Kwangsoo, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.15, no.1, pp.72 - 76, 1997 |
| Measurement and calculation of optical band gap of chromium aluminum oxide films Kim, E; Jiang, ZT; No, Kwangsoo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.39, no.8, pp.4820 - 4825, 2000-08 |
| Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography Jiang, ZT; Hong, Daniel Seungbum; Kim, E; Bae, Byeong-Soo; No, Kwangsoo; Hwangbo, CK; Lim, SC; et al, SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.11, no.10, pp.1450 - 1455, 1996-10 |
| Simulation and fabrication of attenuated phase-shifting masks: CrFx Kim, E; Hong, Daniel Seungbum; Kim, KS; Jiang, ZT; Kim, DW; Lim, S; Woo, SG; et al, APPLIED OPTICS, v.36, no.28, pp.7247 - 7256, 1997-10 |
| Single-Layer Halftone Phase-Shifting Masks for DUV Microlithography : Optical Property Lation and Chromium Compound Film Preparation No, Kwangsoo; Bae, Byeong-Soo; Jiang, ZT; Song, S; Kim, E; Bae, BS; Lim, SC; et al, Eighth International Conference on Solid Films and Surfaces, 1996-01-01 |
| Single-layer halftone phase-shifting masks for DUV microlithography: Optical property simulation and chromium compound film preparation Jiang, ZT; Hong, Daniel Seungbum; Kim, E; Bae, Byeong-Soo; Lim, S; Woo, SG; Koh, YB; et al, APPLIED SURFACE SCIENCE, v.113, pp.680 - 684, 1997-04 |
| Study on Stability of CrFx Flms for Phase Shifting Mask No, Kwangsoo; Kim, E; Hong, S; Jiang, ZT; Lim, S; Woo, SG; Koh, YB, '97 Photomask , pp.294 - 297, 1997-01-01 |
| Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography Jun, BH; Han, SS; Kim, KS; Lee, JS; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; et al, APPLIED OPTICS, v.36, no.7, pp.1482 - 1486, 1997-03 |
| Waveguide Sharacteristics of Sol-Gel Derived PLT thin FIlms No, Kwangsoo; Yoon, DS; Koo, JM; Bae, BS; Lee, WJ; Jiang, ZT; Sung, TH; et al, The 2nd International Meeting of Pacific Rim Ceramic Societies, 1996-01-01 |
| Waveguiding and optical modulation characteristics of sol-gel derived (Pb, La)TiO3 slab waveguides No, Kwangsoo; Yoon, DS; Koo, JM; Bae, BS; Lee, WJ; Jiang, ZT; Sung, TH; et al, International Symposium on Applications of Ferroelectric Thin Films, 1996 |
| 박막의 결정성과 양자역학적인 상수간의 관계에 대한 연구 노광수; 홍승범; 배병수; 고영범; Jiang, ZT; 우상균; 임성출; et al, 한국재료학회 춘계학술발표대회, 한국재료학회, 1996-01-01 |
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