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Interface and microstructural characterization of phosphorus doped silicon on silicon substrate for contact plug = 컨택 플러그용 인 도핑된 실리콘의 계면 및 미세구조 특성 연구link Im, Dong-Hyun; 임동현; et al, 한국과학기술원, 2016 |
Interfacial Layer Control by Dry Cleaning Technology for Polycrystalline and Single Crystalline Silicon Growth Im, Dong-Hyun; Lee, Kong-Soo; Kang, Yoongoo; Jeong, Myoungho; Park, Kwang Wuk; Lee, Soon-Gun; Ma, Jin-Won; et al, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.5, pp.4906 - 4913, 2016-05 |
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